Tien-Chien Jen, Professor, ASME Fellow Head, Department of Mechanical Engineering Science Director, UJ-Nanjing Tech Joint Research Center Director, UJ Manufacturing Research Center University of Johannesburg, South Africa This presentation will be focus on the development of mathematical models and tools for reducing the environmental impact and economic costs of ALD nano-manufacturing processes. A systematic investigation have been performed and there are three major research objectives as stated follows: Objective 1: Mathematical modeling and experimental investigations of ALD process emissions Objective 2: Thermodynamic flows and energy modeling of ALD nano-manufacturing system Objective 3: Sustainable scale-up of ALD nanotechnology for industrial productions This research work was supported by National Science Foundation (NSF) of USA with the funding amount of $475,902. |
